Arrayit Corporation Logo

Arrayit Corporation (ARYC) leads and empowers the genetic, research, pharmaceutical, and diagnostic communities through the discovery, development and manufacture of proprietary life science technologies and consumables for disease prevention, treatment and cure.  - Powerful Science for Life™

Products - Microarray Substrates & Slides - Sputter Deposition of Gold and Silver Thin Films

ArrayIt now has the capability to deliver the sputtering of high quality films of a variety of metals and several compounds onto SuperClean Substrates.  Sputter etching (Ar) and reactive ion etching (RIE) (O2, CF4 ) allows cleaning and activation of substrate surfaces for optimum adhesion. Efficient DC/RF magnetron sources is used. Dielectrics can be deposited by RF or by using metal targets and reactive sputtering. Up to four different materials can be sputtered, without breaking vacuum.

Features the thin film equipment used includes

  • Two DC magnetron sputter sources (Ag, Al, Au, Cr, Cu, Ni, Nichrome™, Ti).
  • Two planar RFdiodes (Cr, Ir, SiO2, Ti, TiW)
  • RF sputter etch/RIE
  • Substrate heating/cooling
  • Low base pressure (< 8.0x10-8 Torr) and liquid nitrogen cold trap
  • Metal films are clean, with excellent adhesion to glass and other substrates
  • Planetary drive allows excellent thickness uniformity across substrates up to 6” (15 cm)

Scientific Publications
Click here and here for recent scientific publications using ArrayIt® brand microarray products for sputtered thin film experimentation.

Ordering Information
Small research level projects are welcome. A minimum setup fees apply to all projects. For additional information and pricing please contact




Copyright 1993-2019 Arrayit Corporation. All rights reserved.